ua
1 | Max ua haujlwm siab 20.6 Mpa. |
2 | Max.Ua haujlwm kub 204 ℃ (Qhov kub kub ib puag ncig mus txog 454 ℃, lub sijhawm no cov khoom sib khi yog hloov nrog nthuav graphite) |
3 | Filter system Cov pa phem, gases, kua siv tau. |
4 | Stainless hlau hmoov metallurgy sintered lim lim raug 2μm ~ 40μm |
5 | Lim ntws 1x 10 -6 ~ 1 × 10-2L / min.cm2 ua.pa |
6 | Lim tuaj yeem hloov tau. |
Khoom nta ntawm Filter
1 | Kev siv dav dav, ntws ntau ntawm 15 txog 300SL / min. |
2 | Nws muaj kev sib raug zoo nrog feem ntau high-purity semiconductor txheej txheem gases. |
3 | 3 nanoparticle filtration muaj peev xwm tswj tau qhov ua tau zoo txaus siab thiab ultra-me me siab poob. |
4 | 5Ra electropolished nto tuaj yeem tiv thaiv kev ua qias tuaj sab hauv. |
5 | Ci nrog kub nitrogen tom qab dej deionized kom tau raws li cov txheej txheem semiconductor. |
6 | 1000 qib plua plav-dawb aseptic Rhiav kev tsim khoom, tu thiab ntim ib puag ncig. |
7 | Kuaj rau 100% helium to. |
Inlet | Qhov hluav taws xob | |
1 | 1/8 "tube haum | 1/8 "tube haum |
2 | 1/4 "tube haum | 1/4 "tube haum |
3 | 3/8 "tube haum | 3/8 "tube haum |
4 | 1/2 "tube haum | 1/2 "tube haum |
5 | 6MM tube haum | 6MM tube haum |
6 | 8MM tube haum | 8MM tube haum |
7 | 10MM tube haum | 10MM tube haum |
8 | 12MM tube haum | 12MM tube haum |
9 | 1/8″ Poj Niam NPT | 1/8″ Poj Niam NPT |
10 | 1/4″ Poj Niam NPT | 1/4″ Poj Niam NPT |
11 | 1/4" Txiv neej NPT | 1/4" Txiv neej NPT |
12 | 3/8" Txiv neej NPT | 3/8" Txiv neej NPT |
13 | 1/2″ Txiv neej NPT | 1/2″ Txiv neej NPT |
Khoom Performance Parameters ntawm Lim
1 | Lim Qhov tseeb | ≥0.0025μm | |
2 | Filtration efficiency | Kev tshem tawm tus nqi 99.99999% ≥0.0025μm | |
3 | Rated ntws | 15L / min | |
4 | 60L / min | ||
5 | 120L / min | ||
6 | 200L / min | ||
7 | 300L / min | ||
8 | Lim muaj pes tsawg leeg | lim ntsiab | 316L / PTFE |
9 | vaj tse | Stainless hlau 316L | |
10 | Cov xwm txheej ua haujlwm | Maximum inlet siab | 21Mpa (310kgf / cm2) |
11 | Qhov siab tshaj qhov sib txawv | 15 Mpa (153kgf / cm2) | |
12 | Ua haujlwm kub siab tshaj plaws | 430 ℃ (inert gas) | |
13 | Helium leakage tus nqi | 1 × 10-9 atm.cc/sec | |
14 | Nto tiav | ≤Ra 5μin |