Tail roj kho cov khoom siv tuaj yeem siv roj thiab tshuaj siv ua kua siv ua kua, SF6, SF6, NH3, NE3O, thiab lwm yam.
Tso cov qauv roj
Raws li cov yam ntxwv ntawm kev tso pa roj, kev kho mob tuaj yeem faib ua plaub hom kev kho mob:
1. Dej ntxuav hom (kho cov pa roj corrosive)
2. Oxidizing Hom (cuam tshuam nrog combustible thiab toxic roj)
3. Kev kos npe (raws li hom khoom adsorption los cuam tshuam nrog cov pa sib tov).
4.Plasma cov kev sib txuas sib xyaw ua ke (txhua hom kev tso pa tawm tuaj yeem kho tau).
Txhua hom kev kho mob muaj nws tus kheej zoo thiab qhov tsis zoo ib yam li nws cov kev thov. Thaum cov qauv kho yog ntxuav, cov khoom siv yog pheej yig thiab yooj yim, thiab tsuas yog siv cov roj av-soluble; Daim ntawv thov cov khoom siv hluav taws xob ntxuav hom yog siab dua li ntawm cov dej ntxuav tes, tab sis kev ua haujlwm nqi yog siab; Lub qhuav hom muaj kev kho mob zoo, thiab tsis siv rau cov roj ntws uas yooj yim kom txhaws lossis ntws.
Tshuaj lom neeg thiab lawv cov khoom siv tau siv nyob rau hauv kev lag luam semiconduct muaj peev xwm tau faib raws li lawv cov tshuaj lom neeg thiab lawv txawv:
1. Flammable gases xws li Sii4h2, thiab lwm yam.
2. Tshuaj lom xws li ash3, PH3, thiab lwm yam.
3. Corrosive gases xws li HF, HCL, thiab lwm yam.
4. Tsev cog khoom roj xws li CF4, NF3, thiab lwm yam.
Txij li thaum plaub sab saum toj no muaj kev phom sij lossis ua kom muaj kev tso pa tawm hauv cov huab cua ntev, yog li nws tsis tuaj yeem hloov pauv ntawm cov txheej txheem sib txawv ntawm cov txheej txheem semiconductor tso pa tawm. Yog li ntawd, nws yog ib qho tsim nyog los xaiv thiab phim cov kev txhaj tshuaj tua hluav taws xob raws li txhua tus txheej txheem txhawm rau txhawm rau daws cov pa roj teeb hauv txoj kev me me. As the working area is mostly away from the central exhaust gas treatment system, often due to gas characteristics lead to crystallization or dust accumulation in the pipeline, resulting in clogging of the pipeline leading to gas leakage, and in serious cases, even cause an explosion, can not ensure that the site staff's work safety. Yog li ntawd, nyob rau thaj chaw ua haujlwm yuav tsum tau teeb tsa cov khoom siv roj me me, txhawm rau txo cov roj cua nyob hauv thaj chaw ua haujlwm, kom muaj kev nyab xeeb ntawm cov neeg ua haujlwm.
Lub sij hawm Post: Aug-10-2023