High-purity gas piping technology yog ib qho tseem ceeb ntawm high-purity gas mov system, uas yog lub ntsiab technology kom xa cov high-purity gas uas yuav tsum tau mus rau lub point ntawm kev siv thiab tseem tuav lub tsim nyog zoo;High-purity gas piping thev naus laus zis suav nrog kev tsim kom raug ntawm lub kaw lus, xaiv cov fittings thiab accessories, kev tsim kho thiab kev teeb tsa, thiab kev sim.Nyob rau hauv xyoo tas los no, qhov kev xav tau nruj zuj zus ntxiv ntawm purity thiab impurity cov ntsiab lus ntawm high-purity gases nyob rau hauv zus tau tej cov microelectronics khoom sawv cev los ntawm loj-scale integrated circuits tau ua lub piping technology ntawm high-purity gases nce kev txhawj xeeb thiab hais txog.Cov hauv qab no yog cov ntsiab lus luv luv ntawm high-purity gas piping los ntawm cov khoom xaivof kev tsim kho, nrog rau kev lees paub thiab kev tswj hwm txhua hnub.
Hom pa roj carbon monoxide
Kev faib tawm ntawm cov pa roj hauv kev lag luam hluav taws xob:
Cov pa roj(Cov pa roj ntau): hydrogen (H2)nitrogen (N2), oxygen (O2), argon (A2), thiab lwm yam.
Cov roj tshwj xeebyog SiH4 ,PH3 ,B2H6 ,A8H3 ,CL ,HCL,CF4 ,NH3,POCL3, SIB 2CL2 SIB 3,NH3, BCL3 ,SIF4 ,CLF3 ,CO,C2F6, N2O,F2,HF,HBR SWB6…… lwm.
Hom roj tshwj xeeb feem ntau tuaj yeem muab cais ua corrosivegas, tshuaj lomgas, nplaim tawsgas, kubgas, inertgas, thiab lwm yam. Feem ntau siv semiconductor gases feem ntau cais raws li hauv qab no.
(i) Corrosive / tshuaj lomgas: HCl, BF3, WF6, HBr , SiH2Cl2, NH3, PH3, Cl2, BCl ib3… lwm yam.
(ii) Flammabilitygas: H2, CH4, SiH4, PH3, AsH3, SiH2Cl2, B2H6, CH2F2,CH3F, CO... etc.
(iii) combustibilitygas: O2, Cl2, N2Aw, NF3… lwm yam.
(iv) Inertgas: N2, CF ua4, C2F6, C4F8,SF6, CO2, Ne, Kr, He...etc.
Muaj ntau cov pa roj semiconductor muaj teeb meem rau tib neeg lub cev.Tshwj xeeb, qee qhov ntawm cov roj no, xws li SiH4 spontaneous combustion, tsuav yog ib tug xau yuav hnov mob nrog cov pa oxygen hauv huab cua thiab pib hlawv;thiab AsH3Cov tshuaj lom heev, qee qhov me me tuaj yeem ua rau muaj kev pheej hmoo ntawm tib neeg lub neej, nws yog vim muaj kev phom sij txaus ntshai, yog li qhov yuav tsum tau ua rau kev nyab xeeb ntawm cov qauv tsim tshwj xeeb yog siab.
Daim ntawv thov Scope ntawm gases
Raws li cov khoom siv tseem ceeb ntawm kev lag luam niaj hnub no, cov khoom siv roj tau siv dav, thiab ntau cov pa roj carbon monoxide lossis cov roj tshwj xeeb yog siv hauv metallurgy, steel, roj av, tshuaj lom neeg kev lag luam, machinery, electronics, iav, ceramics, khoom siv hauv tsev, kev tsim kho. , khoom noj khoom haus, tshuaj thiab kho mob sectors.Daim ntawv thov cov pa roj muaj qhov cuam tshuam tseem ceeb rau cov thev naus laus zis siab ntawm cov teb no tshwj xeeb, thiab yog nws qhov tseem ceeb ntawm cov khoom siv roj lossis cov txheej txheem roj.Tsuas yog nrog cov kev xav tau thiab kev txhawb nqa ntawm ntau yam kev lag luam tshiab thiab kev tshawb fawb thiab thev naus laus zis niaj hnub no, cov khoom lag luam roj tuaj yeem tsim los ntawm leaps thiab ciam teb ntawm ntau yam, zoo thiab ntau.
Kev siv roj hauv microelectronics thiab semiconductor kev lag luam
Kev siv roj ib txwm ua lub luag haujlwm tseem ceeb hauv cov txheej txheem semiconductor, tshwj xeeb tshaj yog cov txheej txheem semiconductor tau siv dav hauv ntau lub lag luam, los ntawm cov tsoos ULSI, TFT-LCD mus rau micro-electro-mechanical (MEMS) kev lag luam tam sim no, tag nrho cov uas siv cov txheej txheem hu ua semiconductor ua cov txheej txheem tsim khoom.Lub purity ntawm cov roj muaj kev txiav txim siab rau kev ua haujlwm ntawm cov khoom siv thiab cov khoom lag luam, thiab kev nyab xeeb ntawm cov khoom siv roj muaj feem xyuam rau kev noj qab haus huv ntawm cov neeg ua haujlwm thiab kev nyab xeeb ntawm kev ua haujlwm ntawm cov nroj tsuag.
Qhov tseem ceeb ntawm high-purity piping nyob rau hauv high-purity gas thauj
Nyob rau hauv cov txheej txheem ntawm stainless hlau melting thiab ua cov khoom, txog 200g ntawm cov roj yuav absorbed ib tuj.Tom qab ua cov hlau tsis huv, tsis tsuas yog nws cov nplaum nplaum nrog ntau yam kab mob, tab sis kuj nyob rau hauv nws cov hlau lattice kuj absorbed ib co nqi roj.Thaum muaj cua ntws los ntawm cov raj xa dej, cov hlau nqus cov pa ntawm cov pa no yuav rov nkag mus rau hauv cov pa tawm, ua rau cov pa ntshiab huv.Thaum cov cua ntws hauv lub raj tsis tu ncua, lub raj adsorbs cov roj nyob rau hauv siab, thiab thaum lub airflow tsis dhau, cov roj adsorbed los ntawm lub raj tsim lub siab poob los daws, thiab cov roj daws kuj nkag mus rau cov roj ntshiab hauv lub raj. raws li impurities.Nyob rau tib lub sijhawm, cov adsorption thiab kev daws teeb meem tau rov ua dua, kom cov hlau nyob rau sab hauv ntawm lub raj kuj ua rau qee cov hmoov av, thiab cov hmoov av hlau no kuj ua rau cov pa ntshiab huv hauv lub raj.Cov yam ntxwv ntawm lub raj no yog qhov tseem ceeb los xyuas kom meej lub purity ntawm cov pa thauj, uas yuav tsum tau tsis tsuas yog ib tug heev smoothness ntawm lub puab nto ntawm lub raj, tab sis kuj ib tug siab hnav tsis kam.
Thaum siv cov roj uas muaj zog corrosive, cov kav dej uas tsis muaj corrosion-resistant stainless hlau yuav tsum tau siv rau cov kav dej.Txwv tsis pub, cov yeeb nkab yuav tsim cov pob txha ntawm sab hauv vim yog corrosion, thiab nyob rau hauv cov xwm txheej hnyav, yuav muaj qhov loj ntawm cov hlau stripping los yog perforation, uas yuav kis tau cov roj ntshiab kom muab faib.
Kev sib txuas ntawm high-purity thiab high-cleanliness gas kis tau tus mob thiab tis pipelines loj txaus nqi.
Nyob rau hauv txoj cai, tag nrho cov ntawm lawv yog welded, thiab cov raj siv yuav tsum tsis muaj kev hloov nyob rau hauv lub koom haum thaum welding yog thov.Cov ntaub ntawv uas muaj cov pa roj carbon ntau dhau yog raug rau huab cua permeability ntawm qhov chaw welded thaum vuam, uas ua rau kev sib nrig sib nkag mus ntawm cov pa hauv thiab sab nraum cov yeeb nkab thiab rhuav tshem cov purity, dryness thiab huv ntawm cov pa xa mus, ua rau poob ntawm tag nrho peb cov kev siv zog.
Nyob rau hauv cov ntsiab lus, rau high-purity gas thiab tshwj xeeb kis tau tus mob pipeline, nws yog ib qhov tsim nyog yuav tau siv ib tug tshwj xeeb kev kho mob ntawm high-purity stainless hlau yeeb nkab, ua rau high-purity pipeline system (xws li kav, fittings, li qub, VMB, VMP) nyob rau hauv high-purity gas faib nyob rau hauv lub luag haujlwm tseem ceeb.
Lub tswv yim dav dav ntawm kev siv tshuab huv rau kev sib kis thiab xa cov kav dej
Cov roj ntshiab huv thiab huv lub cev kis tau nrog cov kav dej txhais tau hais tias muaj qee qhov yuav tsum tau lossis kev tswj hwm peb yam ntawm cov roj yuav tsum tau thauj.
Gas purity: Cov ntsiab lus ntawm impurity cua nyob rau hauv gGas purity: Cov ntsiab lus ntawm impurity cua nyob rau hauv cov pa, feem ntau qhia raws li ib feem pua ntawm cov pa purity, xws li 99.9999%, kuj qhia raws li qhov ntim piv ntawm impurity cua ntsiab lus ppm, ppb, ppt ua.
Qhuav: tus nqi ntawm cov dej noo nyob rau hauv cov roj, los yog tus nqi hu ua ntub dej, feem ntau qhia nyob rau hauv cov nqe lus ntawm dew point, xws li atmospheric siab dew point -70.C.
Kev huv huv: tus naj npawb ntawm cov khoom tsis huv uas muaj nyob rau hauv cov roj, qhov loj me ntawm µm, muaj pes tsawg tus particles / M3 los nthuav qhia, rau cov cua compressed, feem ntau kuj tau hais nyob rau hauv cov nqe lus ntawm pes tsawg mg / m3 ntawm unavoidable khoom seem, uas npog cov roj cov ntsiab lus. .
Kev faib tawm loj ntawm cov pa phem: cov pa phem, feem ntau yog hais txog cov kav xa dej scouring, hnav, corrosion generated los ntawm cov hlau hais, atmospheric soot hais, nrog rau cov kab mob, phages thiab noo noo-muaj roj condensation droplets, thiab lwm yam, raws li qhov loj ntawm nws particle loj. muab faib ua
a) Cov khoom loj - particle loj tshaj 5μm
b) Particle - cov khoom siv txoj kab uas hla ntawm 0.1μm-5μm
c) Ultra-micro hais - particle loj tsawg dua 0.1μm.
Txhawm rau txhim kho daim ntawv thov ntawm cov thev naus laus zis no, kom muaj peev xwm nkag siab txog kev nkag siab ntawm qhov loj me thiab μm units, cov txheej txheem tshwj xeeb yog muab rau siv.
Hauv qab no yog kev sib piv ntawm cov khoom tshwj xeeb
| Lub npe / Particle loj (µm) | Lub npe / Particle loj (µm) | Lub npe / Particle loj (µm) |
| Virus 0.003-0.0 | Aerosol 0.03-1 | Aerosolized microdroplet 1-12 |
| Nuclear roj 0.01-0.1 | Xim 0.1-6 | Fly tshauv 1-200 |
| Cov pa roj carbon dub 0.01-0.3 | Mis hmoov 0.1-10 | Tshuaj tua kab 5-10 |
| Resin 0.01-1 | Cov kab mob 0.3-30 | Cement hmoov av 5-100 |
| Cov pa luam yeeb 0.01-1 | Xuab zeb plua plav 0.5-5 | Txiv lws suav 10-15 |
| Silicone 0.02-0.1 | Tshuaj tua kab 0.5-10 | Tib neeg plaub hau 50-120 |
| Crystallized ntsev 0.03-0.5 | Concentrated sulfur hmoov av 1-11 | Hiav txwv xuab zeb 100-1200 |
Post lub sij hawm: Jun-14-2022